| 000 | 00418nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 180424s9999 xx 000 0 und d | ||
| 020 | _a9.79E+12 | ||
| 084 | _a541.37 L1 | ||
| 100 | _a"Liu, Chang" | ||
| 245 | 0 | _aFoundations of Mems | |
| 250 | _a\\201100ENGGPSX | ||
| 260 | _aPearson | ||
| 260 | _b2011 | ||
| 260 | _cNew Delhi | ||
| 300 | _a576p. | ||
| 500 | _aincludes index and biblioraphy | ||
| 942 | _cBK | ||
| 999 |
_c92684 _d92684 |
||