Plasma Electronics:Applications in Microelectronic Device Fabrication

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Material type: Text

TextPublication details: Institute of Physics Publishing ; 2006; London Edition: \\200600ENGGPSXDescription: 339pISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Barcode
Books	PSG-CAS LIBRARY SW ROW 3 RACK 45 SHELF 2	621.044 M1 (Browse shelf(Opens below))	121	Available	112938

includes index and biblioraphy

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